List of records in nano database
IDs:
76
| Authors : |
Petrik,P.;Fried,M.;Lohner,T.;Berger,R.;Biró,L.,P.;Schneider,C.;Gyulai,J.;Ryssel,H. |
| Title : |
COMPARATIVE STUDY OF POLYSILICON-ON-OXIDE USING SPECTROSCOPIC ELLIPSOMETRY, ATOMIC FORCE MICROSCOPY, AND TRANSMISSION ELECTRON MICROSCOPY |
| JournalName : |
Thin Solid Films |
| PubDateYear : |
1998 |
| PubDateOther : |
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| Volume : |
313/314 |
| Issue : |
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| StartPage : |
260 |
| EndPage : |
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| Keywords : |
ellipsometry;AFM;tapping mode;TEM;roughness;polysilicon;CVD |
| Notes : |
This paper reports on the comparison of ellipsometry, TM-AFM, and TEM roughness data measured on low pressure chemical vapor deposietd polysilicon. |
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