List of records in nano database
IDs:
64
| Authors : |
Biró,L.,P.;Gyulai,J.;Havancsák ,K.;Didyk,A.,Yu.;Frey,L.;Ryssel,H. |
| Title : |
IN-DEPTH DAMAGE DISTRIBUTION CHARACTERIZATION BY SCANNING PROBE METHODS IN TARGETS IRRADIATED WITH 200 MeV IONS |
| JournalName : |
Nucl. Instr. Meth. B |
| PubDateYear : |
1997 |
| PubDateOther : |
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| Volume : |
127/128 |
| Issue : |
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| StartPage : |
32 |
| EndPage : |
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| Keywords : |
AFM;tapping mode;swift heavy ions;in-depth damage distribution;damage zones;roughness;spreading resistance |
| Notes : |
This paper reports on the use of parallel irradiation and TM-AFM measurements for the investigation of in-depth damage distribution in Si. The contribution of the different types of suraface features to the measured roughness values is analysed. Spreading resistance measurements complement the AFM results. |
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