List of records in nano database
IDs:
51
Authors : |
Biró,L.,P.;Gyulai,J.;Lucassen,M.;Gong,L.;Frey,L.;Ryssel,H. |
Title : |
PHOTON ASSISTED IMPLANTATION OF B AND As IN Si |
JournalName : |
Trans. Mat. Res. Soc. Jpn. |
PubDateYear : |
1994 |
PubDateOther : |
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Volume : |
17 |
Issue : |
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StartPage : |
237 |
EndPage : |
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Keywords : |
photon assited;ion implantation;defect engineering;TOP_Misc;YEAR_Before1998;W_Experiment;W_PAI |
Notes : |
This paper describes the effects of photon assited implantation of B and As into Si. |
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