IDs:

100

Authors : Remmler,M.;Frey,L.;Horvath,Z.,E.
Title : Strain profiles in phosphorus implanted (100)-silicon
BookTitle : Proc. of the Ninth Int. Conf. on Ion Beam Modification of Materials Canberra, Australia, 5-10 February, 1995
Editors : Williams,J.,S.;Elliman,R.,G.;Ridgway,M.,C.
PubDateYear : 1996
PubDateOther :
Volume :
Series :
StartPage : 802
EndPage : 805
Publisher : Elsevier Science B.V.
Address :
ISBN :
Keywords :
Notes :
Abstract :
HTML_Local :
HTML_Remote :
Preprint_Local :
Preprint_Remote :