List of records in nano database
IDs:
76
Authors : |
Petrik,P.;Fried,M.;Lohner,T.;Berger,R.;Biró,L.,P.;Schneider,C.;Gyulai,J.;Ryssel,H. |
Title : |
COMPARATIVE STUDY OF POLYSILICON-ON-OXIDE USING SPECTROSCOPIC ELLIPSOMETRY, ATOMIC FORCE MICROSCOPY, AND TRANSMISSION ELECTRON MICROSCOPY |
JournalName : |
Thin Solid Films |
PubDateYear : |
1998 |
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Volume : |
313/314 |
Issue : |
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StartPage : |
260 |
EndPage : |
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Keywords : |
ellipsometry;AFM;tapping mode;TEM;roughness;polysilicon;CVD |
Notes : |
This paper reports on the comparison of ellipsometry, TM-AFM, and TEM roughness data measured on low pressure chemical vapor deposietd polysilicon. |
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