IDs:

75

Authors : Petrik,P.;Fried ,M.;LOhner,T.;Berger,R.;Biró,L.,P.;Schneider,C.;Gyulai,J.;Ryssel,H.
Title : COMPARATIVE STUDY OF SURFACE ROUGHNESS MEASURED ON POLYSILICON USING SPECTROSCOPIC ELLIPSOMETRY AND ATOMIC FORCE MICROSCOPY
JournalName : Thin Solid Films
PubDateYear : 1998
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Volume : 315
Issue :
StartPage : 186
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Keywords : spectroscopic ellipsometry;AFM;tapping mode;polysilicon;roughness
Notes : This papers reports on the comparison of ellipsometry and TM-AFM roughness data om CVD deposited polysilicon thin fils.
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