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IDs:
74
Authors :
Lohner,T.;Khanh,N.,Q.;Petrik,P.;Biró,L.,P.;Fried,M.;Pintér,I.;Lehnert,W.;Frey,L.;Ryssel,H.;Wetnik,D.,J.;Gyulai,J.
Title :
SURFACE DISORDER PRODUCTION DURING PLASMA IMMERSION IMPLANTATION
JournalName :
Thins Solid Films
PubDateYear :
1998
PubDateOther :
Volume :
313/314
Issue :
StartPage :
186
EndPage :
Keywords :
plasma immersion implantation;surface modification;ellipsometry;AFM;roughness;Si
Notes :
The paper reports on the comparison of roughness values measured by ellipsometry and AFM on plasma immersion implanted Si
Abstract :
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