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IDs:
66
Authors :
Khanh,N.,Q.;Tüttô,P.;Jároli,E.,N.;Buiu,O.;Biró,L.,P.;Pászti,F.;Mohácsi,T.;Kovacsics,Cs.;Manuaba,A.;Gyulai,J.
Title :
CHARGE CARRIRER LIFETIME MODIFICATION IN SILICON BY HIGH ENERGY H+, He+ ION IMPLANTATION
JournalName :
Materials Sci. Forum
PubDateYear :
1997
PubDateOther :
Volume :
248-249
Issue :
StartPage :
101
EndPage :
Keywords :
lifetime engineering;Si;ion irradiation;damage;microwave absorbtion;photogenerated carriers
Notes :
The paper reports on the use of the microwave photoconductive decay method for monitoring lifetime modifications induced by ion irradiation in Si.
Abstract :
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