List of records in nano database
IDs:
64
Authors : |
Biró,L.,P.;Gyulai,J.;Havancsák ,K.;Didyk,A.,Yu.;Frey,L.;Ryssel,H. |
Title : |
IN-DEPTH DAMAGE DISTRIBUTION CHARACTERIZATION BY SCANNING PROBE METHODS IN TARGETS IRRADIATED WITH 200 MeV IONS |
JournalName : |
Nucl. Instr. Meth. B |
PubDateYear : |
1997 |
PubDateOther : |
|
Volume : |
127/128 |
Issue : |
|
StartPage : |
32 |
EndPage : |
|
Keywords : |
AFM;tapping mode;swift heavy ions;in-depth damage distribution;damage zones;roughness;spreading resistance |
Notes : |
This paper reports on the use of parallel irradiation and TM-AFM measurements for the investigation of in-depth damage distribution in Si. The contribution of the different types of suraface features to the measured roughness values is analysed. Spreading resistance measurements complement the AFM results. |
Abstract : |
|
HTML_Local : |
|
HTML_Remote : |
|
Preprint_Local : |
|
Preprint_Remote : |
|
Warning: all transactions are logged!