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53


Authors : Biró,L.,P.;Gyulai,J.;Khanh,N.,Q.
Title : INFLUENCE OF SAMPLE THICKNESS ON CARRIER LIFETIME MODIFICATON INDUCED BY 4 MeV PROTON IMPLANTATION IN SILICON
JournalName : Nucl. Instr. Meth. B
PubDateYear : 1996
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Volume : 112
Issue :
StartPage : 173
EndPage :
Keywords : lifetime engineering;ion irradiation;Si;damage distribution;microwave absorbtion;TOP_Misc;YEAR_Before1998;W_Experiment;W_PAI
Notes : This paper describes the dependence of the lifetime values measured by microwave absorbtion on photogenerated carriers in Si damaged by 4 MeV protons.
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