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51


Authors : Biró,L.,P.;Gyulai,J.;Lucassen,M.;Gong,L.;Frey,L.;Ryssel,H.
Title : PHOTON ASSISTED IMPLANTATION OF B AND As IN Si
JournalName : Trans. Mat. Res. Soc. Jpn.
PubDateYear : 1994
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Volume : 17
Issue :
StartPage : 237
EndPage :
Keywords : photon assited;ion implantation;defect engineering;TOP_Misc;YEAR_Before1998;W_Experiment;W_PAI
Notes : This paper describes the effects of photon assited implantation of B and As into Si.
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