IDs:

50

Authors : Gyulai,J.;Ryssel,H.;Biró,L.,P.;Frey,L.;Kuki,A.;Kormány,T.;Serfôzô,G.;Khanh,N.,Q.
Title : ATHERMAL EFFECTS IN ION IMPLANTATION
JournalName : Radd. Eff.
PubDateYear : 1994
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Volume : 127
Issue :
StartPage : 397
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Keywords : photon assisted;ion implantation;defect engineering;TOP_Misc;YEAR_Before1998;W_Experiment;W_PAI
Notes : This paper describes the effects due to simultaneous photon irradiation during B implantation into Si.
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