List of records in nano database
IDs:
387
Authors : |
Németh,Á.;Horváth,E.;Lábadi,Z.;Fedák,L.;Bársony,I. |
Title : |
Single step deposition of different morphology ZnO gas sensing films |
JournalName : |
Sensors and Actuators B |
PubDateYear : |
2007 |
PubDateOther : |
|
Volume : |
127 |
Issue : |
|
StartPage : |
157 |
EndPage : |
160 |
Keywords : |
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Notes : |
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Abstract : |
Al-doped ZnO thin films were deposited onto fixed silicon substrates by dc reactive sputtering. The inherent lateral inhomogeneity in the deposited
film with areas of different morphology and sheet resistance revealed different sensing properties. This novel approach offers the possibility of
controllable deposition of ZnO sensing layers for the simultaneous manufacturing of sensors with different properties in an array in a single
technological step. |
HTML_Local : |
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HTML_Remote : |
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Preprint_Local : |
http://www.nanotechnology.hu/reprint/SensActB_127_157_Nemeth_ZnO_GasSensing.pdf |
Preprint_Remote : |
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