List of records in nano database
IDs:
385
| Authors : |
Nagy,N.;Pap,A.,E.;Deák,A.;Volk,J.;Horváth,E.;Hórvölgyi,Z.;Bársony,I. |
| Title : |
Regular patterning of PS substrates by a self-assembled mask |
| JournalName : |
Physica Status Solidi C |
| PubDateYear : |
2007 |
| PubDateOther : |
|
| Volume : |
4 |
| Issue : |
|
| StartPage : |
2021 |
| EndPage : |
2025 |
| Keywords : |
|
| Notes : |
|
| Abstract : |
Regularly ordered porous structures were fabricated in ion-implanted p- and n-type silicon. Mono-layered
Langmuir-Blodgett (LB) films and a double-layered film from Stöber silica spheres of 350 nm diameter
were used as masking layers in the boron and phosphorus ion-implantation step, providing the laterally
periodic doping structure. The various ordered porous structures are obtained after the anodic etch process.
The PS layer can be removed by alkaline etching. The masking LB silica layer and the resulting structures
are shown in the SEM images. Using the self-assembled nanoparticles, regular patterns of high resolution
can easily be prepared in an inexpensive manner on large area silicon. |
| HTML_Local : |
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| HTML_Remote : |
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| Preprint_Local : |
http://www.nanotechnology.hu/reprint/PhysStatSolC_4_2021_Nagy.pdf |
| Preprint_Remote : |
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