IDs:

359

Authors : Vazsonyi,E;Adam,P;Ducso,C;Vizvary,Z;Toth,A,L;Barsony,I
Title : Tree-dimensional force sensor by novel alkaline etching technique
JournalName : Sensors and Actuators A-Physical
PubDateYear : 2005
PubDateOther : SEP 23
Volume : 123
Issue : 24
StartPage : 620
EndPage : 626
Keywords : TOP_Misc;W_Experiment ;W_FESEM;W_Sensor
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