IDs:

32

Authors : Horváth,Zsolt,E.;Pető,Gábor;Zsoldos,Éva;Gyulai,József
Title : Strain distribution in As+ and Sb+ ion implanted and annealed (100) Si
JournalName : Nuclear Instruments and Methods B
PubDateYear : 1993
PubDateOther :
Volume : B80/81
Issue :
StartPage : 552
EndPage : 555
Keywords : strain;XRD;TOP_Ion;YEAR_Before1998;W_Experiment
Notes :
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