IDs:

292

Authors : Vázsonyi,E,B;Vértesy,Z;Holly,S
Title : CHARACTERIZATION OF TWO - LAYER RESIST
BookTitle : Microelectronic Engineering
Editors :
PubDateYear : 1985
PubDateOther :
Volume : 3
Series :
StartPage : 525
EndPage : 532
Publisher : North Holland
Address :
ISBN :
Keywords :
Notes :
Abstract :
HTML_Local :
HTML_Remote :
Preprint_Local :
Preprint_Remote :