IDs:

271

Authors : Pászti,F;Manuaba,A;Szilágyi,E;Vázsonyi,E;Vértesy,Z
Title : DENSIFICATION AND NOBLE GAS RETENTION OF ION-IMPLANTED POROUS SILICON
JournalName : Nuclear Instruments and Methods in Physics Research B
PubDateYear : 1996
PubDateOther :
Volume : 117
Issue :
StartPage : 253
EndPage : 259
Keywords :
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Abstract :
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