IDs:

237

Authors : Vazsonyi,E;Vértesy,Z;Tóth,A,L;Szlufcik,J
Title : Anisotropic etching of silicon in a two-component alkaline solution
JournalName : J. of Micromechanics and Microengineering
PubDateYear : 2003
PubDateOther :
Volume : 13
Issue : 2
StartPage : 165
EndPage : 169
Keywords :
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