IDs:

202

Authors : Ramadan,E.;Lohner,T.;Pintér,I.;Petrik,P.;Khánh,N.,Q.;Horváth,Z.,E.;Gyulai,J.
Title : Characterization of near surface region of plasma immersion ion implanted silicon using Rutherford backscattering spectrometry, Transmission Electron Microscopy and spectroscopic ellipsometry
JournalName : Vacuum
PubDateYear : 2003
PubDateOther :
Volume : 71
Issue :
StartPage : 27
EndPage : 31
Keywords : TOP_Misc;W_Experiment;W_TEM
Notes :
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