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148


Authors : Molnár,G.,L.;Pető,G.;Zsoldos,E.;Horváth,Z.,E.
Title : Interaction of copper metallization with rare-earth metals and silicides
JournalName : JOURNAL OF APPLIED PHYSICS
PubDateYear : 2001
PubDateOther :
Volume : 90
Issue : 1
StartPage : 503-505
EndPage :
Keywords :
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