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IDs:
148
Authors :
Molnár,G.,L.;Pető,G.;Zsoldos,E.;Horváth,Z.,E.
Title :
Interaction of copper metallization with rare-earth metals and silicides
JournalName :
JOURNAL OF APPLIED PHYSICS
PubDateYear :
2001
PubDateOther :
Volume :
90
Issue :
1
StartPage :
503-505
EndPage :
Keywords :
Notes :
Abstract :
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