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143


Authors : Szilágyi,E.;Khanh,N.,Q.;Horváth,Z.,E.;Lohner,T.;Battisting,G.;Zolnai,Z.;Kotai,E.;Gyulai,J.
Title : Ion bombardment induced damage in silicon carbide studied by ion beam analytical methods
JournalName : SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000 MATERIALS SCIENCE FORUM
PubDateYear : 2000
PubDateOther :
Volume : 353
Issue : 3
StartPage : 271
EndPage : 274
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